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Anisotropic Bruggeman effective medium approaches for slanted columnar thin films
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10.1063/1.4819240
/content/aip/journal/jap/114/8/10.1063/1.4819240
http://aip.metastore.ingenta.com/content/aip/journal/jap/114/8/10.1063/1.4819240

Figures

Image of FIG. 1.
FIG. 1.

Cross-sectional high-resolution SEM images of the slanted columnar thin films from cobalt, titanium and silicon, respectively, on crystalline silicon substrates. Scale bars are 500 nm.

Image of FIG. 2.
FIG. 2.

Experimental (circles) and best-match model calculated (solid lines) Mueller matrix data of a Si slanted columnar thin film versus sample azimuth angle at . The two graphs for each Mueller matrix element represent two different angles of incidence and .

Image of FIG. 3.
FIG. 3.

Experimental (circles) and best-match model calculated (solid lines) Mueller matrix data of a Si slanted columnar thin film for two different angles of incidence ( and ) within the spectral range from 400 to 1650 nm.

Image of FIG. 4.
FIG. 4.

Effective major axes optical constants, refractive indices and extinction coefficients , along major polarizability axes , , of Co, Ti, and Si determined by HBLA (solid lines), TAB-EMA (dotted lines) and RAB-EMA (dashed lines). EMA results have been determined with analysis procedure I.

Image of FIG. 5.
FIG. 5.

Constituent bulk-like optical constants, refractive indices and extinction coefficients, of Co, Ti, and Si as determined by TAB-EMA (dotted lines) and RAB-EMA (dashed lines), and also in comparison with reference data obtained from a 100 nm thick solid film (solid line). EMA results have been determined with analysis procedure I.

Image of FIG. 6.
FIG. 6.

Effective major axes optical constants, refractive indices and extinction coefficients , along major polarizability axes , , of Co, Ti, and Si determined by HBLA (solid lines), TAB-EMA (dotted lines) and RAB-EMA (dashed lines). EMA results have been determined with analysis procedure II.

Image of FIG. 7.
FIG. 7.

Constituent bulk-like optical constants, refractive indices and extinction coefficients, of Co, Ti, and Si as determined by TAB-EMA (dotted lines) and RAB-EMA (dashed lines), and also in comparison with data obtained from a 100 nm thick solid film (solid line). EMA results have been determined with analysis procedure II.

Tables

Generic image for table
Table I.

Summary of thickness and slanting angle estimates from cross-sectional SEM image analysis for the three slanted columnar thin films depicted in Fig. 1 .

Generic image for table
Table II.

Summary of the best-match model parameters for Co, Ti, and Si slanted columnar thin films determined with analysis procedure I.

Generic image for table
Table III.

Summary of the best-match model parameters for Co, Ti, and Si slanted columnar thin films. EMA results have been determined with analysis procedure II.

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/content/aip/journal/jap/114/8/10.1063/1.4819240
2013-08-26
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Anisotropic Bruggeman effective medium approaches for slanted columnar thin films
http://aip.metastore.ingenta.com/content/aip/journal/jap/114/8/10.1063/1.4819240
10.1063/1.4819240
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