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1.
1. J. Koike and M. Wada, Appl. Phys. Lett. 87, 041911 (2005).
http://dx.doi.org/10.1063/1.1993759
2.
2. J. Koike, M. Haneda, J. Iijima, Y. Otsuka, H. Sako, and K. Neishi, J. Appl. Phys. 102, 043527 (2007).
http://dx.doi.org/10.1063/1.2773699
3.
3. M. Haneda, J. Iijima, and J. Koike, Appl. Phys. Lett. 90, 252107 (2007).
http://dx.doi.org/10.1063/1.2750402
4.
4. K. Matsumoto, K. Neishi, H. Itoh, H. Sato, S. Hosaka, and J. Koike, Appl. Phys. Express 2, 036503 (2009).
http://dx.doi.org/10.1143/APEX.2.036503
5.
5. J. M. Ablett, J. C. Woicik, Z. Tőkei, S. List, and E. Dimasi, Appl. Phys. Lett. 94, 042112 (2009).
http://dx.doi.org/10.1063/1.3068500
6.
6. J. G. Lozano, S. Lozano-Perez, J. Bogan, Y. C. Wang, B. Brennan, P. D. Nellist, and G. Hughes, Appl. Phys. Lett. 98, 123112 (2011).
http://dx.doi.org/10.1063/1.3569146
7.
7. C. H. Liu, W. Liu, Y. H. Wang, Y. Wang, Z. An, Z. X. Song, and K. W. Xu, Microelectron Eng. 98, 80 (2012).
http://dx.doi.org/10.1016/j.mee.2012.05.054
8.
8. J. Iijima, Y. Fujii, K. Neishi, and J. Koike, J. Vac. Sci. Technol. B 27, 1963 (2009).
http://dx.doi.org/10.1116/1.3179167
9.
9. C.-Y. Wu, C.-T. Wu, W.-H. Lee, S.-C. Chang, and Y.-L. Wang, J. Alloys Compds. 542, 118 (2012).
http://dx.doi.org/10.1016/j.jallcom.2012.06.093
10.
10. Z. Czigány, F. Misják, O. Geszti, and G. Radnóczi, Acta Mater. 60, 7226 (2012).
http://dx.doi.org/10.1016/j.actamat.2012.09.034
11.
11. A. F. Mayadas and M. Shatzkes, Phys. Rev. B 1, 1382 (1970).
http://dx.doi.org/10.1103/PhysRevB.1.1382
12.
12. Á. Barna, G. Radnóczi, and B. Pécz, Preparation Techniques for Transmission Electron Microscopy ( VHC, Cambridge, 1997), Vol. 3, p. 751.
13.
13. W. Zhang, S. H. Brongersma, O. Richard, B. Brijs, R. Palmans, L. Froyen, and K. Maex, Microelectron Eng. 76, 146 (2004).
http://dx.doi.org/10.1016/j.mee.2004.07.041
14.
14. P. D. Desai, H. M. James, and C. Y. Ho, J. Phys. Chem. Ref. Data 13, 1131 (1984).
http://dx.doi.org/10.1063/1.555725
15.
15. Z. Fan, P. Tsakiropoulos, and A. P. Miodownik, J. Mater. Sci. 29, 141 (1994).
http://dx.doi.org/10.1007/BF00356585
16.
16. V. V. R. N. Rao, S. Mohan, and P. J. Reddy, J. Phys. D 9, 89 (1976).
http://dx.doi.org/10.1088/0022-3727/9/1/015
17.
17. K. Pekala and D. Oleszak, Rev. Adv. Mater. Sci. 18, 197 (2008).
18.
18. V. F. Gantmakher, JETP Lett. 94, 626 (2011).
http://dx.doi.org/10.1134/S0021364011200033
19.
19. J. H. Mooij, Phys. Status Solidi A 17, 521 (1973).
http://dx.doi.org/10.1002/pssa.2210170217
20.
20. P. Gibbs, T. M. Harders, and J. H. Smith, J. Phys. F 15, 213 (1985).
http://dx.doi.org/10.1088/0305-4608/15/1/022
21.
21. R. K. Chouhan and A. Mookerjee, J. Magn. Magn. Mater. 323, 868 (2011).
http://dx.doi.org/10.1016/j.jmmm.2010.11.070
22.
22. I. Petrov, P. B. Barna, L. Hultman, and J. E. Greene, J. Vac. Sci. Technol. A 21, S117 (2003).
http://dx.doi.org/10.1116/1.1601610
23.
23.See http://resource.npl.co.uk/mtdata/phdiagrams/cumn.htm for National Physical Laboratory.
24.
24. H. Okamoto, J. Phase Equilib. 19, 180 (1998).
http://dx.doi.org/10.1361/105497198770342661
25.
25. P. B. Barna and M. Adamik, Thin Solid Films 317, 27 (1998).
http://dx.doi.org/10.1016/S0040-6090(97)00503-8
26.
26. F. A. Otter, J. Appl. Phys. 27, 197 (1956).
http://dx.doi.org/10.1063/1.1722342
27.
27. C. A. Domenicali and E. L. Christenson, J. Appl. Phys. 32, 2450 (1961).
http://dx.doi.org/10.1063/1.1777090
28.
28. D. E. Gray, AIP Handbook ( McGraw-Hill, New York, 1972).
29.
29. M. Haneda, N. Ohtsuka, H. Kudo, T. Tabira, M. Sunayama, N. Shimizu, H. Ochimizu, and A. Tsukune, Jpn. J. Appl. Phys. 49, 05FA01 (2010).
http://dx.doi.org/10.1143/JJAP.49.05FA01
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/content/aip/journal/jap/116/8/10.1063/1.4893718
2014-08-25
2016-12-05

Abstract

Electrical properties and corresponding structural features of Cu-Mn alloy films with potential application as barrier and interconnect layers were studied. Cu-Mn films were deposited by DC magnetron sputtering at room temperature on SiO substrates. Electrical resistivity measurements were made as a function of film composition and temperature. The specific resistivity varies linearly with the Mn content showing a maximum of 205 Ωcm at 80 at. % Mn. The temperature coefficient of resistance (TCR) of all alloy films is low, showing non-metallic conductivity for most compositions. Also a minimum TCR has been observed in the 40–80 at. % Mn range which was attributed to a magnetic transformation around 200–300 K. Electrical resistivity measurements are correlated with the film structure revealed by transmission electron microscopy to clarify the phase regions throughout the composition range. In the 20–40 at. % and 70–80 at. % Mn ranges, two-phase structures were identified, where Cu- or Mn-rich solid solution grains were surrounded by a thin amorphous covering layer. Based on the revealed phase regions and morphologies electron scattering mechanisms in the system were evaluated by combining the Matthiessen's rule and the Mayadas-Schatzkes theory. Grain boundary reflectivity coefficients (r = 0.6–0.8) were calculated from fitting the model to the measurements. The proposed model indicates that, in a binary system, the special arrangement of the two phases results in new scattering mechanisms. The results are of value in optimizing the various parameters needed to produce a suitable barrier layer.

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