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/content/aip/journal/jap/120/9/10.1063/1.4961407
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/content/aip/journal/jap/120/9/10.1063/1.4961407
2016-09-01
2016-09-24

Abstract

A rolling-based printing approach for transferring arrays of patterned micro- and nano-structures directly from rigid fabrication substrates onto flexible substrates is presented. Transfer-printing experiments show that the new process can achieve high-yield and high-fidelity transfer of silicon nanomembrane components with diverse architectures to polyethylene terephthalate substrates over chip-scale areas (>1 × 1 cm2) in <0.3 s. The underlying mechanics of the process are investigated through finite element simulations of the contact and transfer process. These mechanics models provide guidance for controlling the contact area and strain in the flexible substrate during transfer, both of which are key for achieving reproducible and controlled component transfer over large areas.

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