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Sputtering at Acute Incidence
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10.1063/1.1703035
/content/aip/journal/jap/36/11/10.1063/1.1703035
http://aip.metastore.ingenta.com/content/aip/journal/jap/36/11/10.1063/1.1703035
/content/aip/journal/jap/36/11/10.1063/1.1703035
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/content/aip/journal/jap/36/11/10.1063/1.1703035
2004-07-14
2014-09-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Sputtering at Acute Incidence
http://aip.metastore.ingenta.com/content/aip/journal/jap/36/11/10.1063/1.1703035
10.1063/1.1703035
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