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Electronmicroscopic evidence for a columnar‐void‐type structure in sputtered NbN films
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10.1063/1.1663003
/content/aip/journal/jap/45/1/10.1063/1.1663003
http://aip.metastore.ingenta.com/content/aip/journal/jap/45/1/10.1063/1.1663003
/content/aip/journal/jap/45/1/10.1063/1.1663003
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/content/aip/journal/jap/45/1/10.1063/1.1663003
2003-10-06
2014-07-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electronmicroscopic evidence for a columnar‐void‐type structure in sputtered NbN films
http://aip.metastore.ingenta.com/content/aip/journal/jap/45/1/10.1063/1.1663003
10.1063/1.1663003
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