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SiP precipitation within the doped silicon lattice, concomitant with phosphorus predeposition
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10.1063/1.322549
/content/aip/journal/jap/47/12/10.1063/1.322549
http://aip.metastore.ingenta.com/content/aip/journal/jap/47/12/10.1063/1.322549
/content/aip/journal/jap/47/12/10.1063/1.322549
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/content/aip/journal/jap/47/12/10.1063/1.322549
2008-08-28
2015-03-01
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Scitation: SiP precipitation within the doped silicon lattice, concomitant with phosphorus predeposition
http://aip.metastore.ingenta.com/content/aip/journal/jap/47/12/10.1063/1.322549
10.1063/1.322549
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