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Microfabrication and evaluation of diffractive optical filters prepared by reactive sputter etching
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10.1063/1.326499
/content/aip/journal/jap/50/6/10.1063/1.326499
http://aip.metastore.ingenta.com/content/aip/journal/jap/50/6/10.1063/1.326499
/content/aip/journal/jap/50/6/10.1063/1.326499
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/content/aip/journal/jap/50/6/10.1063/1.326499
2008-07-24
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microfabrication and evaluation of diffractive optical filters prepared by reactive sputter etching
http://aip.metastore.ingenta.com/content/aip/journal/jap/50/6/10.1063/1.326499
10.1063/1.326499
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