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Hydrogen in semi‐insulating polycrystalline silicon films
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22.Nuclear techniques themselves cannot yield absolute concentrations as , but rather the produce of the concentration and layer thickness in . However, concentrations ratios of one atomic species to another can be obtained as a function of layer depth.21 An independent film thickness or density measurement is required to specify absolute concentration.
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33.By way of contrast, with no added, decomposition is complete at 650 °C and so there should be little or no H in the polycrystalline Si. Bagley, et al.,34 report that there is H only at about the 0.1 at. % level in LP polycrystalline Si deposited by decomposition of at 650 °C.
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