No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Hydrogen in semi‐insulating polycrystalline silicon films
1.H. Fritzsche, C. C. Tsai, and P. Persans, Solid State Technol. 21, 55 (1978).
2.E. A. Taft, J. Electrochem. Soc. 118, 1341 (1971).
3.H. J. Stein and H. A. R. Wegener, J. Electrochem. Soc. 124, 908 (1977).
4.H. J. Stein, S. T. Picraux, and P. H. Holloway, IEEE Trans. Electron Devices ED25, 1008 (1978).
5.K. H. Beckmann and N. J. Harrick, J. Electrochem. Soc. 118, 614 (1971).
6.A. G. Revesz, J. Electrochem. Soc. 124, 1811 (1977).
7.A. G. Revesz, in Proceedings of the International Topical Conference on the Physics of and Its Interfaces, Yorktown Heights, N. Y., 22‐24 March 1978, (Pergamon, New York, 1978), p. 222.
8.B. Keramati and J. N. Zemel, in Proceedings of the International Topical Conference on the Physics 0f and Its Interfaces, Yorktown Heights, N. Y., 22‐24March 1978, (Pergamon, New York, 1978), p. 459.
9.M. A. Paesler, D. A. Anderson, E. C. Freeman, G. Moddel, and W. Paul, Phys. Rev. Lett. 41, 1492 (1978).
10.H. Mochizuki, T. Aoki, H. Yamoto, M. Okayama, M. Abe, and T. Ando, Suppl. Jpn. J. Appl. Phys. 15, 41 (1976).
11.D. E. Carlson and C. W. Magee, Appl. Phys. Lett. 33, 81 (1978).
12.M. H. Brodsky, M. Cardona, and J. J. Cuomo, Phys. Rev. B 16, 3556 (1977).
13.M. H. Brodsky, M. A. Frisch, J. F. Ziegler, and W. A. Lanford, Appl. Phys. Lett. 30, 561 (1977).
14.M. Milleville, W. Fuhs, F. J. Demond, H. Mannsperger, G. Mueller, and S. Kalbitzer, Appl. Phys. Lett. 34, 173 (1979).
15.K. J. Matysik, C. J. Mogab, and B. G. Bagley, J. Vac. Sci. Technol. 15, 302 (1978).
16.W. A. Lanford and M. J. Rand, J. Appl. Phys. 49, 2473 (1978).
17.W. R. Knolle and H. R. Maxwell, Jr., Electrochem. Soc. Meeting, October 1979, Ext. Abst. 572.
18.W. A. Lanford, Nucl. Instrum. Methods. 149, 19 (1978).
19.J. F. Ziegler, J. W. Mayer, B. M. Ullrich, and W‐K. Chu in New Uses for Ion Accelerators, edited by J. F. Ziegler (Plenum, New York, 1975), Chaps. 2A, 2B, 2C.
20.D. K. Brice, Thin Solid Films 19, 121 (1973), Eq. 22.
21.R. E. Benenson, L. C. Feldman, and B. G. Bagley, Nucl. Inst, and Meth.168, 547 (1980).
22.Nuclear techniques themselves cannot yield absolute concentrations as , but rather the produce of the concentration and layer thickness in . However, concentrations ratios of one atomic species to another can be obtained as a function of layer depth.21 An independent film thickness or density measurement is required to specify absolute concentration.
23.H. R. Maxwell, Jr. and W. R. Knolle in Semiconductor Characterization Techniques, Vol. 78‐3 (Electrochemical Socity, New York, 1978), p. 180.
24.L. C. Northcliffe and R. F. Schilling, Nucl. Data Tables A7, 463 (1974).
25.N. N. Gerasimenko, T. I. Kovalevskaya, and G. M. Tseitlin, J. Appl. Spectrosc. (USSR) 28, 600 (1978).
26.ASTM Procedure F12176.
27.H. R. Maxwell, Jr. and W. R. Knolle, Electrochem. Soc. Meeting, May, 1979, Ext. Abst. 166.
28.W. R. Knolle (unpublished work);
28.also see Ref. 29.
29.E. Ritter, Opt. Acta 9, 197 (1962).
30.S. P. Sharma, W. R. Knolle, and H. R. Maxwell, Jr. (unpublished).
30.Also J. H. Thomas, III, and A. M. Goodman, J. Electrochem. Soc. 126, 1776 (1979).
31.R. B. Laughlin at Theoretical Physics Seminar at Bell Laboratories, Murray Hill, N. J., 7 March 1979 (unpublished).
32.H. R. Maxwell, Jr. and W. R. Knolle (unpublished).
33.By way of contrast, with no added, decomposition is complete at 650 °C and so there should be little or no H in the polycrystalline Si. Bagley, et al.,34 report that there is H only at about the 0.1 at. % level in LP polycrystalline Si deposited by decomposition of at 650 °C.
34.B. G. Bagley, P. K. Gallagher, R. E. Benenson, and C. J. Mogab, Electrochem. Soc. Meeting, May 1979, Ext. Abst. 175.
35.A. L. Smith and N. C. Angelotti, Spectrochim. Acta 13, 412 (1959).
Article metrics loading...
Full text loading...
Most read this month
Most cited this month