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Deep levels related to ion‐implanted tellurium in silicon
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10.1063/1.331919
/content/aip/journal/jap/54/11/10.1063/1.331919
http://aip.metastore.ingenta.com/content/aip/journal/jap/54/11/10.1063/1.331919
/content/aip/journal/jap/54/11/10.1063/1.331919
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/content/aip/journal/jap/54/11/10.1063/1.331919
1983-11-01
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Deep levels related to ion‐implanted tellurium in silicon
http://aip.metastore.ingenta.com/content/aip/journal/jap/54/11/10.1063/1.331919
10.1063/1.331919
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