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Silicon loss during TiSi2 formation
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10.1063/1.338297
/content/aip/journal/jap/61/11/10.1063/1.338297
http://aip.metastore.ingenta.com/content/aip/journal/jap/61/11/10.1063/1.338297
/content/aip/journal/jap/61/11/10.1063/1.338297
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/content/aip/journal/jap/61/11/10.1063/1.338297
1987-06-01
2015-03-01
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Scitation: Silicon loss during TiSi2 formation
http://aip.metastore.ingenta.com/content/aip/journal/jap/61/11/10.1063/1.338297
10.1063/1.338297
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