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Influence of SiO2 at the Ta2O5/Si interface on dielectric characteristics of Ta2O5 capacitors
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10.1063/1.337945
/content/aip/journal/jap/61/6/10.1063/1.337945
http://aip.metastore.ingenta.com/content/aip/journal/jap/61/6/10.1063/1.337945
/content/aip/journal/jap/61/6/10.1063/1.337945
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/content/aip/journal/jap/61/6/10.1063/1.337945
1987-03-15
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of SiO2 at the Ta2O5/Si interface on dielectric characteristics of Ta2O5 capacitors
http://aip.metastore.ingenta.com/content/aip/journal/jap/61/6/10.1063/1.337945
10.1063/1.337945
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