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Anisotropically etched deep gratings for InP/InGaAsP optical devices
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10.1063/1.339319
/content/aip/journal/jap/62/8/10.1063/1.339319
http://aip.metastore.ingenta.com/content/aip/journal/jap/62/8/10.1063/1.339319
/content/aip/journal/jap/62/8/10.1063/1.339319
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/content/aip/journal/jap/62/8/10.1063/1.339319
1987-10-15
2014-08-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Anisotropically etched deep gratings for InP/InGaAsP optical devices
http://aip.metastore.ingenta.com/content/aip/journal/jap/62/8/10.1063/1.339319
10.1063/1.339319
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