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Novel microstructures for the i n s i t u measurement of mechanical properties of thin films
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10.1063/1.339285
/content/aip/journal/jap/62/9/10.1063/1.339285
http://aip.metastore.ingenta.com/content/aip/journal/jap/62/9/10.1063/1.339285
/content/aip/journal/jap/62/9/10.1063/1.339285
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/content/aip/journal/jap/62/9/10.1063/1.339285
1987-11-01
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Novel microstructures for the insitu measurement of mechanical properties of thin films
http://aip.metastore.ingenta.com/content/aip/journal/jap/62/9/10.1063/1.339285
10.1063/1.339285
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