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Variable angle spectroscopic ellipsometry: Application to GaAs‐AlGaAs multilayer homogeneity characterization
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10.1063/1.340406
/content/aip/journal/jap/63/10/10.1063/1.340406
http://aip.metastore.ingenta.com/content/aip/journal/jap/63/10/10.1063/1.340406
/content/aip/journal/jap/63/10/10.1063/1.340406
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/content/aip/journal/jap/63/10/10.1063/1.340406
1988-05-15
2014-11-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Variable angle spectroscopic ellipsometry: Application to GaAs‐AlGaAs multilayer homogeneity characterization
http://aip.metastore.ingenta.com/content/aip/journal/jap/63/10/10.1063/1.340406
10.1063/1.340406
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