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Kinetics of titanium silicide formation on single‐crystal Si: Experiment and modeling
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10.1063/1.342445
/content/aip/journal/jap/64/10/10.1063/1.342445
http://aip.metastore.ingenta.com/content/aip/journal/jap/64/10/10.1063/1.342445
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/content/aip/journal/jap/64/10/10.1063/1.342445
1988-11-15
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Kinetics of titanium silicide formation on single‐crystal Si: Experiment and modeling
http://aip.metastore.ingenta.com/content/aip/journal/jap/64/10/10.1063/1.342445
10.1063/1.342445
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