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Influence of surface coatings on elasticity, residual stresses, and fracture properties of silicon microelements
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10.1063/1.342585
/content/aip/journal/jap/65/1/10.1063/1.342585
http://aip.metastore.ingenta.com/content/aip/journal/jap/65/1/10.1063/1.342585
/content/aip/journal/jap/65/1/10.1063/1.342585
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/content/aip/journal/jap/65/1/10.1063/1.342585
1989-01-01
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of surface coatings on elasticity, residual stresses, and fracture properties of silicon microelements
http://aip.metastore.ingenta.com/content/aip/journal/jap/65/1/10.1063/1.342585
10.1063/1.342585
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