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Gettering in silicon
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10.1063/1.342714
/content/aip/journal/jap/65/8/10.1063/1.342714
http://aip.metastore.ingenta.com/content/aip/journal/jap/65/8/10.1063/1.342714
/content/aip/journal/jap/65/8/10.1063/1.342714
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/content/aip/journal/jap/65/8/10.1063/1.342714
1989-04-15
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Gettering in silicon
http://aip.metastore.ingenta.com/content/aip/journal/jap/65/8/10.1063/1.342714
10.1063/1.342714
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