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Model of plasma source ion implantation in planar, cylindrical, and spherical geometries
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10.1063/1.345722
/content/aip/journal/jap/67/3/10.1063/1.345722
http://aip.metastore.ingenta.com/content/aip/journal/jap/67/3/10.1063/1.345722
/content/aip/journal/jap/67/3/10.1063/1.345722
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/content/aip/journal/jap/67/3/10.1063/1.345722
1990-02-01
2015-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Model of plasma source ion implantation in planar, cylindrical, and spherical geometries
http://aip.metastore.ingenta.com/content/aip/journal/jap/67/3/10.1063/1.345722
10.1063/1.345722
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