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Mechanisms of thermal stress relaxation and stress‐induced voiding in narrow aluminum‐based metallizations
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10.1063/1.347457
/content/aip/journal/jap/69/12/10.1063/1.347457
http://aip.metastore.ingenta.com/content/aip/journal/jap/69/12/10.1063/1.347457
/content/aip/journal/jap/69/12/10.1063/1.347457
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/content/aip/journal/jap/69/12/10.1063/1.347457
1991-06-15
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mechanisms of thermal stress relaxation and stress‐induced voiding in narrow aluminum‐based metallizations
http://aip.metastore.ingenta.com/content/aip/journal/jap/69/12/10.1063/1.347457
10.1063/1.347457
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