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Stress relaxation of passivated aluminum line metallizations on silicon substrates
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10.1063/1.347222
/content/aip/journal/jap/69/3/10.1063/1.347222
http://aip.metastore.ingenta.com/content/aip/journal/jap/69/3/10.1063/1.347222
/content/aip/journal/jap/69/3/10.1063/1.347222
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/content/aip/journal/jap/69/3/10.1063/1.347222
1991-02-01
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stress relaxation of passivated aluminum line metallizations on silicon substrates
http://aip.metastore.ingenta.com/content/aip/journal/jap/69/3/10.1063/1.347222
10.1063/1.347222
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