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BF2 implanted polycrystalline silicon gates with and without CoSi2: Microstructure and work functions
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10.1063/1.347241
/content/aip/journal/jap/69/3/10.1063/1.347241
http://aip.metastore.ingenta.com/content/aip/journal/jap/69/3/10.1063/1.347241
/content/aip/journal/jap/69/3/10.1063/1.347241
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/content/aip/journal/jap/69/3/10.1063/1.347241
1991-02-01
2014-07-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: BF2 implanted polycrystalline silicon gates with and without CoSi2: Microstructure and work functions
http://aip.metastore.ingenta.com/content/aip/journal/jap/69/3/10.1063/1.347241
10.1063/1.347241
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