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Improvement of photoconductivity of a‐SiC:H films by introducing nitrogen during magnetron sputtering process
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10.1063/1.347242
/content/aip/journal/jap/69/3/10.1063/1.347242
http://aip.metastore.ingenta.com/content/aip/journal/jap/69/3/10.1063/1.347242
/content/aip/journal/jap/69/3/10.1063/1.347242
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/content/aip/journal/jap/69/3/10.1063/1.347242
1991-02-01
2014-12-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improvement of photoconductivity of a‐SiC:H films by introducing nitrogen during magnetron sputtering process
http://aip.metastore.ingenta.com/content/aip/journal/jap/69/3/10.1063/1.347242
10.1063/1.347242
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