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Anomalous Sb redistribution during the preparation of delta‐doping layers in silicon
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10.1063/1.349447
/content/aip/journal/jap/70/4/10.1063/1.349447
http://aip.metastore.ingenta.com/content/aip/journal/jap/70/4/10.1063/1.349447
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/content/aip/journal/jap/70/4/10.1063/1.349447
1991-08-15
2014-07-10
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Scitation|Anomalous Sb redistribution during the preparation of delta‐doping layers in silicon
http://aip.metastore.ingenta.com/content/aip/journal/jap/70/4/10.1063/1.349447
10.1063/1.349447
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