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Damage production and annealing in 2 8Si‐implanted CoSi2/Si(111) heterostructures
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10.1063/1.351325
/content/aip/journal/jap/71/2/10.1063/1.351325
http://aip.metastore.ingenta.com/content/aip/journal/jap/71/2/10.1063/1.351325
/content/aip/journal/jap/71/2/10.1063/1.351325
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/content/aip/journal/jap/71/2/10.1063/1.351325
1992-01-15
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Damage production and annealing in 28Si‐implanted CoSi2/Si(111) heterostructures
http://aip.metastore.ingenta.com/content/aip/journal/jap/71/2/10.1063/1.351325
10.1063/1.351325
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