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A technique for projection x‐ray lithography using computer‐generated holograms
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10.1063/1.351003
/content/aip/journal/jap/71/6/10.1063/1.351003
http://aip.metastore.ingenta.com/content/aip/journal/jap/71/6/10.1063/1.351003
/content/aip/journal/jap/71/6/10.1063/1.351003
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/content/aip/journal/jap/71/6/10.1063/1.351003
1992-03-15
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A technique for projection x‐ray lithography using computer‐generated holograms
http://aip.metastore.ingenta.com/content/aip/journal/jap/71/6/10.1063/1.351003
10.1063/1.351003
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