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Characterization of boron carbide thin films fabricated by plasma enhanced chemical vapor deposition from boranes
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10.1063/1.352060
/content/aip/journal/jap/72/10/10.1063/1.352060
http://aip.metastore.ingenta.com/content/aip/journal/jap/72/10/10.1063/1.352060
/content/aip/journal/jap/72/10/10.1063/1.352060
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/content/aip/journal/jap/72/10/10.1063/1.352060
1992-11-15
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization of boron carbide thin films fabricated by plasma enhanced chemical vapor deposition from boranes
http://aip.metastore.ingenta.com/content/aip/journal/jap/72/10/10.1063/1.352060
10.1063/1.352060
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