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Multiparameter measurements of thin films using beam‐profile reflectometry
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10.1063/1.352421
/content/aip/journal/jap/73/11/10.1063/1.352421
http://aip.metastore.ingenta.com/content/aip/journal/jap/73/11/10.1063/1.352421
/content/aip/journal/jap/73/11/10.1063/1.352421
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/content/aip/journal/jap/73/11/10.1063/1.352421
1993-06-01
2015-03-04
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Multiparameter measurements of thin films using beam‐profile reflectometry
http://aip.metastore.ingenta.com/content/aip/journal/jap/73/11/10.1063/1.352421
10.1063/1.352421
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