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Heavy doping effects in the diffusion of group IV and V impurities in silicon
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10.1063/1.353324
/content/aip/journal/jap/73/2/10.1063/1.353324
http://aip.metastore.ingenta.com/content/aip/journal/jap/73/2/10.1063/1.353324
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/content/aip/journal/jap/73/2/10.1063/1.353324
1993-01-15
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Heavy doping effects in the diffusion of group IV and V impurities in silicon
http://aip.metastore.ingenta.com/content/aip/journal/jap/73/2/10.1063/1.353324
10.1063/1.353324
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