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On the identification of N dangling bonds in SiN films using x‐ray absorption studies
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10.1063/1.354075
/content/aip/journal/jap/73/6/10.1063/1.354075
http://aip.metastore.ingenta.com/content/aip/journal/jap/73/6/10.1063/1.354075
/content/aip/journal/jap/73/6/10.1063/1.354075
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/content/aip/journal/jap/73/6/10.1063/1.354075
1993-03-15
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: On the identification of N dangling bonds in SiN films using x‐ray absorption studies
http://aip.metastore.ingenta.com/content/aip/journal/jap/73/6/10.1063/1.354075
10.1063/1.354075
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