1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Analytical model for the out‐diffusion of an exponentially decaying impurity profile. Application to nitrogen in silicon
Rent:
Rent this article for
USD
10.1063/1.352971
/content/aip/journal/jap/73/7/10.1063/1.352971
http://aip.metastore.ingenta.com/content/aip/journal/jap/73/7/10.1063/1.352971
Loading

Article metrics loading...

/content/aip/journal/jap/73/7/10.1063/1.352971
1993-04-01
2014-04-21
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Analytical model for the out‐diffusion of an exponentially decaying impurity profile. Application to nitrogen in silicon
http://aip.metastore.ingenta.com/content/aip/journal/jap/73/7/10.1063/1.352971
10.1063/1.352971
SEARCH_EXPAND_ITEM