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Growth and modeling of cw‐UV induced oxidation of silicon
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10.1063/1.355888
/content/aip/journal/jap/75/1/10.1063/1.355888
http://aip.metastore.ingenta.com/content/aip/journal/jap/75/1/10.1063/1.355888
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/content/aip/journal/jap/75/1/10.1063/1.355888
1994-01-01
2014-09-15
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Growth and modeling of cw‐UV induced oxidation of silicon
http://aip.metastore.ingenta.com/content/aip/journal/jap/75/1/10.1063/1.355888
10.1063/1.355888
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