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Raman spectroscopy and spreading resistance analysis of phosphorus implanted and annealed silicon
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10.1063/1.356543
/content/aip/journal/jap/75/12/10.1063/1.356543
http://aip.metastore.ingenta.com/content/aip/journal/jap/75/12/10.1063/1.356543
/content/aip/journal/jap/75/12/10.1063/1.356543
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/content/aip/journal/jap/75/12/10.1063/1.356543
1994-06-15
2015-08-04
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Raman spectroscopy and spreading resistance analysis of phosphorus implanted and annealed silicon
http://aip.metastore.ingenta.com/content/aip/journal/jap/75/12/10.1063/1.356543
10.1063/1.356543
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