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Generation of delocalized E ’ δ defects in buried Si oxide by hole injection
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13.“Standard” in this context refers to BOX of state-of-the-art SIMOX postimplantation annealed at
14.We remark, for clarity, that although the identification of the defect in BOX was first carried out in Refs. 8 and 9, some ESR spectra of previous works on BOX did exhibit delocalized signal features. For the present compilation, it is precisely the ESR properties of these features that have been included in Table I.
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20.It is interesting to note that, in a neat SIMOX analysis, R. Stahlbush, W. E. Carlos, and S. M. Prokes (Ref. 12) did report a paramagnetic ESR peak in nonoptimized (i.e., BOX submitted to 10 mrad x rays. No such signal, however, could be observed in BOX annealed at 1275 C, that is, closer to standard quality.
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