1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Electron‐density and energy distributions in a planar inductively coupled discharge
Rent:
Rent this article for
USD
10.1063/1.357672
/content/aip/journal/jap/76/4/10.1063/1.357672
http://aip.metastore.ingenta.com/content/aip/journal/jap/76/4/10.1063/1.357672
/content/aip/journal/jap/76/4/10.1063/1.357672
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/jap/76/4/10.1063/1.357672
1994-08-15
2014-10-02
Loading

Full text loading...

This is a required field
Please enter a valid email address
This feature is disabled while Scitation upgrades its access control system.
This feature is disabled while Scitation upgrades its access control system.
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electron‐density and energy distributions in a planar inductively coupled discharge
http://aip.metastore.ingenta.com/content/aip/journal/jap/76/4/10.1063/1.357672
10.1063/1.357672
SEARCH_EXPAND_ITEM