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Ultraviolet light induced annihilation of silicon dangling bonds in hydrogenated amorphous silicon nitride films
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10.1063/1.359593
/content/aip/journal/jap/77/11/10.1063/1.359593
http://aip.metastore.ingenta.com/content/aip/journal/jap/77/11/10.1063/1.359593
/content/aip/journal/jap/77/11/10.1063/1.359593
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/content/aip/journal/jap/77/11/10.1063/1.359593
1995-06-01
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ultraviolet light induced annihilation of silicon dangling bonds in hydrogenated amorphous silicon nitride films
http://aip.metastore.ingenta.com/content/aip/journal/jap/77/11/10.1063/1.359593
10.1063/1.359593
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