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Measurements of electromagnetic fields in a planar radio‐frequency inductively coupled plasma source
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10.1063/1.360585
/content/aip/journal/jap/78/1/10.1063/1.360585
http://aip.metastore.ingenta.com/content/aip/journal/jap/78/1/10.1063/1.360585
/content/aip/journal/jap/78/1/10.1063/1.360585
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/content/aip/journal/jap/78/1/10.1063/1.360585
1995-07-01
2014-11-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measurements of electromagnetic fields in a planar radio‐frequency inductively coupled plasma source
http://aip.metastore.ingenta.com/content/aip/journal/jap/78/1/10.1063/1.360585
10.1063/1.360585
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