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Epitaxial growth of CoSi2 layer on (100)Si and facet formation at the CoSi2/Si interface
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10.1063/1.360201
/content/aip/journal/jap/78/3/10.1063/1.360201
http://aip.metastore.ingenta.com/content/aip/journal/jap/78/3/10.1063/1.360201
/content/aip/journal/jap/78/3/10.1063/1.360201
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/content/aip/journal/jap/78/3/10.1063/1.360201
1995-08-01
2015-01-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Epitaxial growth of CoSi2 layer on (100)Si and facet formation at the CoSi2/Si interface
http://aip.metastore.ingenta.com/content/aip/journal/jap/78/3/10.1063/1.360201
10.1063/1.360201
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