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Plasma immersion ion implantation model including multiple charge state
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10.1063/1.361390
/content/aip/journal/jap/79/7/10.1063/1.361390
http://aip.metastore.ingenta.com/content/aip/journal/jap/79/7/10.1063/1.361390
/content/aip/journal/jap/79/7/10.1063/1.361390
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/content/aip/journal/jap/79/7/10.1063/1.361390
1996-04-01
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Plasma immersion ion implantation model including multiple charge state
http://aip.metastore.ingenta.com/content/aip/journal/jap/79/7/10.1063/1.361390
10.1063/1.361390
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