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Structural and dielectric properties of epitaxial films grown on Si(100) substrate with TiN buffer layer
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10.1063/1.364240
/content/aip/journal/jap/81/5/10.1063/1.364240
http://aip.metastore.ingenta.com/content/aip/journal/jap/81/5/10.1063/1.364240
/content/aip/journal/jap/81/5/10.1063/1.364240
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/content/aip/journal/jap/81/5/10.1063/1.364240
1997-03-01
2014-08-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural and dielectric properties of epitaxial SrTiO3 films grown on Si(100) substrate with TiN buffer layer
http://aip.metastore.ingenta.com/content/aip/journal/jap/81/5/10.1063/1.364240
10.1063/1.364240
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