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Argon metastable densities in radio frequency Ar, and electrical discharges
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10.1063/1.366111
/content/aip/journal/jap/82/6/10.1063/1.366111
http://aip.metastore.ingenta.com/content/aip/journal/jap/82/6/10.1063/1.366111
/content/aip/journal/jap/82/6/10.1063/1.366111
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/content/aip/journal/jap/82/6/10.1063/1.366111
1997-09-15
2015-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Argon metastable densities in radio frequency Ar, Ar/O2 and Ar/CF4 electrical discharges
http://aip.metastore.ingenta.com/content/aip/journal/jap/82/6/10.1063/1.366111
10.1063/1.366111
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