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Analysis and design of an interdigital cantilever as a displacement sensor
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10.1063/1.367984
/content/aip/journal/jap/83/12/10.1063/1.367984
http://aip.metastore.ingenta.com/content/aip/journal/jap/83/12/10.1063/1.367984
/content/aip/journal/jap/83/12/10.1063/1.367984
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/content/aip/journal/jap/83/12/10.1063/1.367984
1998-06-15
2014-08-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Analysis and design of an interdigital cantilever as a displacement sensor
http://aip.metastore.ingenta.com/content/aip/journal/jap/83/12/10.1063/1.367984
10.1063/1.367984
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