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In situ ellipsometric characterization of films grown by laser ablation
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10.1063/1.368778
/content/aip/journal/jap/84/9/10.1063/1.368778
http://aip.metastore.ingenta.com/content/aip/journal/jap/84/9/10.1063/1.368778
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/content/aip/journal/jap/84/9/10.1063/1.368778
1998-11-01
2015-02-28
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Scitation: In situ ellipsometric characterization of SiNx films grown by laser ablation
http://aip.metastore.ingenta.com/content/aip/journal/jap/84/9/10.1063/1.368778
10.1063/1.368778
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