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Atomic absorption spectroscopic measurements of silicon atom concentrations in electron cyclotron resonance silicon oxide deposition plasmas
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10.1063/1.369424
/content/aip/journal/jap/85/1/10.1063/1.369424
http://aip.metastore.ingenta.com/content/aip/journal/jap/85/1/10.1063/1.369424
/content/aip/journal/jap/85/1/10.1063/1.369424
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/content/aip/journal/jap/85/1/10.1063/1.369424
1999-01-01
2014-10-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atomic absorption spectroscopic measurements of silicon atom concentrations in electron cyclotron resonance silicon oxide deposition plasmas
http://aip.metastore.ingenta.com/content/aip/journal/jap/85/1/10.1063/1.369424
10.1063/1.369424
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