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Spectroscopic ellipsometry analyses of sputtered nanostructures
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10.1063/1.370307
/content/aip/journal/jap/85/8/10.1063/1.370307
http://aip.metastore.ingenta.com/content/aip/journal/jap/85/8/10.1063/1.370307
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/content/aip/journal/jap/85/8/10.1063/1.370307
1999-04-15
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spectroscopic ellipsometry analyses of sputtered Si/SiO2 nanostructures
http://aip.metastore.ingenta.com/content/aip/journal/jap/85/8/10.1063/1.370307
10.1063/1.370307
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