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Properties of atomic layer deposited solid solution films and nanolaminates
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10.1063/1.371576
/content/aip/journal/jap/86/10/10.1063/1.371576
http://aip.metastore.ingenta.com/content/aip/journal/jap/86/10/10.1063/1.371576
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/content/aip/journal/jap/86/10/10.1063/1.371576
1999-11-15
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Properties of atomic layer deposited (Ta1−xNbx)2O5 solid solution films and Ta2O5–Nb2O5 nanolaminates
http://aip.metastore.ingenta.com/content/aip/journal/jap/86/10/10.1063/1.371576
10.1063/1.371576
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