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Reactively sputtered Ru–Si–O films
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10.1063/1.370996
/content/aip/journal/jap/86/4/10.1063/1.370996
http://aip.metastore.ingenta.com/content/aip/journal/jap/86/4/10.1063/1.370996
/content/aip/journal/jap/86/4/10.1063/1.370996
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/content/aip/journal/jap/86/4/10.1063/1.370996
1999-08-15
2014-12-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reactively sputtered Ru–Si–O films
http://aip.metastore.ingenta.com/content/aip/journal/jap/86/4/10.1063/1.370996
10.1063/1.370996
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