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The species dependence of inert gas ion incorporation in the ion-induced deposition of tungsten
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10.1063/1.371137
/content/aip/journal/jap/86/5/10.1063/1.371137
http://aip.metastore.ingenta.com/content/aip/journal/jap/86/5/10.1063/1.371137
/content/aip/journal/jap/86/5/10.1063/1.371137
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/content/aip/journal/jap/86/5/10.1063/1.371137
1999-09-01
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The species dependence of inert gas ion incorporation in the ion-induced deposition of tungsten
http://aip.metastore.ingenta.com/content/aip/journal/jap/86/5/10.1063/1.371137
10.1063/1.371137
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