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Structural characterization of rapid thermal oxidized alloy films grown by rapid thermal chemical vapor deposition
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10.1063/1.371843
/content/aip/journal/jap/87/1/10.1063/1.371843
http://aip.metastore.ingenta.com/content/aip/journal/jap/87/1/10.1063/1.371843
/content/aip/journal/jap/87/1/10.1063/1.371843
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/content/aip/journal/jap/87/1/10.1063/1.371843
2000-01-01
2014-07-12
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural characterization of rapid thermal oxidized Si1−x−yGexCy alloy films grown by rapid thermal chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/jap/87/1/10.1063/1.371843
10.1063/1.371843
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