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Structure of nitrogenated carbon films prepared from acetylene and nitrogen mixture in electron cyclotron resonance plasma
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10.1063/1.373018
/content/aip/journal/jap/87/10/10.1063/1.373018
http://aip.metastore.ingenta.com/content/aip/journal/jap/87/10/10.1063/1.373018
/content/aip/journal/jap/87/10/10.1063/1.373018
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/content/aip/journal/jap/87/10/10.1063/1.373018
2000-05-15
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structure of nitrogenated carbon films prepared from acetylene and nitrogen mixture in electron cyclotron resonance plasma
http://aip.metastore.ingenta.com/content/aip/journal/jap/87/10/10.1063/1.373018
10.1063/1.373018
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