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Rapid thermal oxidation of silicon in ozone
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10.1063/1.373515
/content/aip/journal/jap/87/11/10.1063/1.373515
http://aip.metastore.ingenta.com/content/aip/journal/jap/87/11/10.1063/1.373515
/content/aip/journal/jap/87/11/10.1063/1.373515
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/content/aip/journal/jap/87/11/10.1063/1.373515
2000-06-01
2014-08-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Rapid thermal oxidation of silicon in ozone
http://aip.metastore.ingenta.com/content/aip/journal/jap/87/11/10.1063/1.373515
10.1063/1.373515
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